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High vacuum angle valve series XL provides excellent thermal
conductivity results in a uniform temperature for the entire valve body
and a marked decrease in the condensation of gases inside the valve.
The valve does not contain heavy metals such as Ni (nickel) or Cr
(chrome) and a low sputtering yield also helps to minimize heavy metal
contamination of semiconductor wafers.
More on the XL range.
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Aluminum One-touch Connection and Release High Vacuum Angle Valve
- One-touch connection and release (no tool)
- Bellows seal
- Body made of Aluminum
- Bellows made of Stainless steel 316L
More on the XLAQ range.
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Aluminum One-touch Connection and Release High Vacuum Angle Valve
- One-touch connection and release (no tool)
- Bellows seal O-ring Seal
- Body made of Aluminum
- Bellows made of Stainless steel 316L
More on the XLDQ range.
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Aluminum High Vacuum Angle Valve 2-Step Control, Single Acting/Bellows Seal, O-ring Seal
Flange size: 25,40,50,63,80
More on the XLD / XLDV range.
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Series XM (high vacuum angle valve) and XY (high vacuum in-line valve)
feature body materials of SUS (stainless steel). The structure of the
XM is the same as the XL, except the body material of the XL is
aluminum. The XM series is interchangeable with the XL series. The
precision cast, one piece manufacturing process of the XY series
prevents imperfections due to accumulation of gas and ensures no
porosity in the body.
More on the XM and XY range.
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Series XMD (high vacuum angle valve)
feature body materials of SUS (stainless steel). The XMD series is interchangeable with the XL series. The
precision cast, one piece manufacturing process of the XMD series
prevents imperfections due to accumulation of gas and ensures no
porosity in the body.
More on the XMD range.
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