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HRZ

Refrigerated Thermo-chiller

High Performance Chiller with Built-in inverter.

  • In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
  • Wide temperature range and cooling capacity range covered by one unit
  • Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions.
  • Conforms to UL and SEMI specifications, CE marking.


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